Friction drive using ultrasonic motors for ultraprecision positioning
Friction-drive systems open new possibilities in high-precision machinery and precision processing
We are developing the world's first ultraprecision positioning stage driven by an ultrasonic motor (USM). Compared with conventional electromagnetic-motor stages, it achieves half the size and three times the positioning precision. Wear control at the friction-drive interface is key to this performance. We introduce highly wear-resistant ceramics at the friction interface and aim to establish mechanical designs for wear control and software designs for actuation.
Research topics listed for FY2007
- Linear ultrasonic motors for high-speed ultraprecision positioning stages (M2: 村上 瑞真)
- Improving the durability of surface acoustic wave motors by controlling the electrical potential of friction surfaces (M1: 千葉 義直)